Nikon Metrology / Products / Semiconductor Systems / Semiconductor Equipment / Optistation-3000

Nikon Optistation-3000 Wafer Inspection System

Available in Americas only

Overview

Built upon Nikon's proven front end process technology, the OPTISTATION 3000 offers high-precision, ultra-fast inspection for 300mm wafers.

Its efficient transfer sequence, new robotic arm, FOUP opener, and enhanced macro observation functions all contribute to especially high yield rates – making the OST-3000 a high throughput wafer inspection powerhouse. In addition, the system provides the highest system reliability in its class, using a safety design that complies with SEMI standards.

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Categories: Semiconductor Equipment

Applications: Wafers

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